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3D LITHOGRAPHY. Atomic gold-enabled three-dimensional lithography for silicon mesostructures. | LitMetric

3D LITHOGRAPHY. Atomic gold-enabled three-dimensional lithography for silicon mesostructures.

Science

Department of Chemistry, the University of Chicago, Chicago, IL 60637, USA. The James Franck Institute, the University of Chicago, Chicago, IL 60637, USA. The Institute for Biophysical Dynamics, Chicago, IL 60637, USA.

Published: June 2015

AI Article Synopsis

  • Three-dimensional mesostructured semiconductors have potential applications but lack many synthesis methods.
  • By using metal diffusion on semiconductor surfaces, specifically gold on silicon nanowires, researchers have created etchant-resistant patterns through a process of deposition-diffusion-incorporation.
  • This technique produces unique skeletal and motif structures, and it shows that individual gold atoms play a crucial role in the lithographic process while improving the strength of the resulting material's interaction with hydrogels.

Article Abstract

Three-dimensional (3D) mesostructured semiconductors show promising properties and applications; however, to date, few methods exist to synthesize or fabricate such materials. Metal can diffuse along semiconductor surfaces, and even trace amounts can change the surface behavior. We exploited the phenomena for 3D mesoscale lithography, by showing one example where iterated deposition-diffusion-incorporation of gold over silicon nanowires forms etchant-resistant patterns. This process is facet-selective, producing mesostructured silicon spicules with skeletonlike morphology, 3D tectonic motifs, and reduced symmetries. Atom-probe tomography, coupled with other quantitative measurements, indicates the existence and the role of individual gold atoms in forming 3D lithographic resists. Compared to other more uniform silicon structures, the anisotropic spicule requires greater force for detachment from collagen hydrogels, suggesting enhanced interfacial interactions at the mesoscale.

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Source
http://dx.doi.org/10.1126/science.1257278DOI Listing

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