Process calibration method for designing silicon-on-insulator contra-directional grating couplers.

We present a process calibration method for designing silicon-on-insulator (SOI) contra-directional grating couplers (contra-DCs). Our method involves determining the coupling coefficients of fabricated contra-DCs by using their full-width-at-half-maximum (FWHM) bandwidths. As compared to the null method that uses the bandwidth measured at the first nulls, our FWHM method obtains more consistent results since the FWHM bandwidth is more easily determined. We also extract the coupling coefficients using curve-fitting which provide values that are in general agreement with the values obtained using our method. However, as compared to the curve-fitting method, our method does not require knowledge of the insertion loss and is easier to implement. Our method can be used to predict the FWHM bandwidths, the maximum power coupling factors, the minimum power transmission factors, and the through port group delays and dispersions of subsequent, fabricated devices, which is useful in designing filters.