If a vibration module is added on laser machining system, the quality of surface finish and aspect ratio on metals can be significantly enhanced. In this study, a single mobility model of vibrating laser along the path of laser beam was put forward. In order to realize the desired unidirectional motion, a resonance type vibration module with optical lens was designed and manufactured. This cylindrical module was composed of curved-beam flexure elements. The cylindrical coordinate system was established to describe the relationship of a curved-beam flexure element's motion and deformation. In addition, the stiffness matrix of the curved-beam element was obtained. Finite element method and dynamical modeling were provided to analyze the resonance frequency and the displacement of the motion. The feasibility of the design was demonstrated with the help of experiments on frequency response. Experimental results show good agreement with theoretical analysis and simulation predictions.
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