We report the fabrication and characterization of high index contrast (Δn≈0.9) GeTe4 channel waveguides on ZnSe substrate for evanescent-field-based biosensing applications in the mid-IR spectral region. GeTe4 films were deposited by RF sputtering and characterized for their structure, composition, transparency, and dispersion. The lift-off technique was used to pattern the waveguide channels. Waveguiding from 2.5-3.7 and 6.4-7.5 μm was demonstrated, and mode intensity profile and estimated propagation losses are given for the 3.5 μm wavelength.
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