Cross-linking of polydimethylsiloxane (PDMS) is increasingly important with recent focus on its top surface stiffness. In this paper, we demonstrate that hyperthermal hydrogen projectile bombardment, a surface sensitive cross-linking technology, is superior in enhancing the mechanical properties of a cured PDMS surface without significantly degrading its hydrophobicity. Both water contact angle measurements and time-of-flight secondary ion mass spectrometry are used to investigate the variations in surface chemistry and structure upon cross-linking. Using nanoindentation and atomic force microscopy, we confirm that the thickness of the cross-linked PDMS is controllable by the bombardment time, which opens opportunities for tuning cross-linking degree in compliance with arising requirements from the practice.
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