AI Article Synopsis
- Different methods of physical vapor deposition are used to create strontium titanate thin films, with varying stoichiometry from titanium-rich to strontium-rich compositions.
- Crystallization of these films is studied using grazing-incidence X-ray diffraction, revealing temperature-dependent crystallization dynamics, with perovskite formation starting at 473 K for Sr-rich layers and 739 K for Sr-depleted films.
- Heating causes silicon from the substrate to diffuse into SrTiO layers, resulting in secondary silicate phases, confirmed through various advanced imaging and analysis techniques.
Article Abstract
Different physical vapor deposition methods have been used to fabricate strontium titanate thin films. Within the binary phase diagram of SrO and TiO the stoichiometry ranges from Ti rich to Sr rich, respectively. The crystallization of these amorphous SrTiO layers is investigated by grazing-incidence X-ray diffraction using synchrotron radiation. The crystallization dynamics and evolution of the lattice constants as well as crystallite sizes of the SrTiO layers were determined for temperatures up to 1223 K under atmospheric conditions applying different heating rates. At approximately 473 K, crystallization of perovskite-type SrTiO is initiated for Sr-rich electron beam evaporated layers, whereas Sr-depleted sputter-deposited thin films crystallize at 739 K. During annealing, a significant diffusion of Si from the substrate into the SrTiO layers occurs in the case of Sr-rich composition. This leads to the formation of secondary silicate phases which are observed by X-ray diffraction, transmission electron microscopy and X-ray photoelectron spectroscopy.
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| http://www.ncbi.nlm.nih.gov/pmc/articles/PMC4379435 | PMC |
| http://dx.doi.org/10.1107/S160057671500240X | DOI Listing |
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