A magnetic micro-manipulator for application of three dimensional forces.

Magnetic manipulation finds diverse applications in actuation, characterization, and manipulation of micro- and nano-scale samples. This paper presents the design and development of a novel magnetic micro-manipulator for application of three-dimensional forces on a magnetic micro-bead. A simple analytical model is proposed to obtain the forces of interaction between the magnetic micro-manipulator and a magnetic micro-bead. Subsequently, guidelines are proposed to perform systematic design and analysis of the micro-manipulator. The designed micro-manipulator is fabricated and evaluated. The manipulator is experimentally demonstrated to possess an electrical bandwidth of about 1 MHz. The ability of the micro-manipulator to apply both in-plane and out-of-plane forces is demonstrated by actuating permanent-magnet micro-beads attached to micro-cantilever beams. The deformations of the micro-cantilevers are also employed to calibrate the dependence of in-plane and out-of-plane forces on the position of the micro-bead relative to the micro-manipulator. The experimentally obtained dependences are found to agree well with theory.