In EUV lithography, the absorption of EUV light causes wavefront distortion that deteriorates the imaging process. An adaptive optics system has been developed ["Adaptive optics to counteract thermal aberrations," Ph.D. thesis (TU Delft, 2013)] to correct for this distortion using an active mirror (AM). This AM is thermally actuated by absorbing an irradiance profile exposed by a projector onto the AM. Due to thermal conductivity and bimorph-like deformation of the AM, the relation between actuation profile and actuated shape is not trivial. Therefore, this Letter describes how actuation profiles are obtained to generate Zernike shapes. These actuation profiles have been obtained by a finite-element-based optimization procedure. Furthermore, these actuation profiles are exposed to the AM, and the resulting deformations are measured. This Letter shows actuated Zernike shapes with purities higher than 0.9 for most actuation profiles. In addition, superimposed actuation profiles resulted in superimposed Zernike shapes, showing linearity needed to apply modal wavefront correction. Therefore, this approach can be used to obtain actuation profiles for this AM concept, which can be used for highly precise wavefront correction.
Download full-text PDF |
Source |
|---|---|
| http://dx.doi.org/10.1364/OL.40.000205 | DOI Listing |
Publication Analysis
Top Keywords
Similar Publications
On-chip non-contact mechanical cell stimulation - quantification of SKOV-3 alignment to suspended microstructures.
Heliyon
January 2025
Electrical and Computer Engineering, University of Canterbury, Christchurch, New Zealand.
Although the accumulation of random genetic mutations has been traditionally viewed as the main cause of cancer progression, altered mechanobiological profiles of the cells and microenvironment also play a major role as a mutation-independent element. To probe the latter, we have previously reported a microfluidic cell-culture platform with an integrated flexible actuator and its application for sequential cyclic compression of cancer cells. The platform is composed of a control microchannel in a top layer for introducing external pressure, and a polydimethylsiloxane (PDMS) membrane from which a monolithically-integrated actuator protrudes downwards into a cell-culture microchannel.
View Article and Find Full Text PDFMicrofluidic fractionation of microplastics, bacteria and microalgae with induced-charge electro-osmotic eddies.
Anal Chim Acta
February 2025
School of Control Engineering, Northeastern University at Qinhuangdao, Qinhuangdao, 066004, PR China; Hebei Key Laboratory of Micro-Nano Precision Optical Sensing and Measurement Technology, Qinhuangdao, 066004, PR China. Electronic address:
Background: Fractionation of microalgal cells has important applications in producing pharmaceuticals and treating diseases. Multiple types of microalgal cells generally coexist in the oceans or lakes and are easily contaminated by microplastics and bacteria. Therefore, it is of paramount significance to develop an effective fractionation approach for microalgal cells for biological applications.
View Article and Find Full Text PDFBoundary Layer Control with a Plasma Actuator Utilizing a Large GND Mesh Electrode and Two HV Electrode Configurations.
Sensors (Basel)
December 2024
Faculty of Management, Lublin University of Technology, 20-618 Lublin, Poland.
This article presents the results of experimental studies on the influence of the geometry of high-voltage plasma actuator electrodes on the change in flow in the boundary layer and their influence on the change in the lift coefficient. The plasma actuator used in the described experimental studies has a completely different structure. The experimental model of the plasma actuator uses a large mesh ground electrode and different geometries of the high-voltage electrodes, namely copper solid electrodes and mesh electrodes (the use of mesh electrodes, large GND and HV is a new solution).
View Article and Find Full Text PDFModeling Electrowetting on Dielectric for Novel Droplet-Based Microactuation.
Micromachines (Basel)
December 2024
Department of Mechanical Engineering, Brigham Young University, 350 Engineering Building, Provo, UT 84602, USA.
Recent advancements in Electrowetting on Dielectric (EWOD) systems, such as simplified fabrication, low-voltage actuation, and the development of more reliable materials, are expanding the potential applications of electrowetting actuators. One application of EWOD actuators is in RF devices to enable dynamic reconfiguration and allow real-time adjustments to frequency and bandwidth. In this paper, a method is introduced to actuate a panel using EWOD forces.
View Article and Find Full Text PDFCompensating elastic faults in a torque-assisted knee exoskeleton: functional evaluation and user perception study.
J Neuroeng Rehabil
December 2024
Chair of Autonomous Systems and Mechatronics, Friedrich-Alexander University Erlangen-Nürnberg, Erlangen, Germany.
Wearable robots are often powered by elastic actuators, which can mimic the intrinsic compliance observed in human joints, contributing to safe and seamless interaction. However, due to their increased complexity, when compared to direct drives, elastic actuators are susceptible to faults, which pose significant challenges, potentially compromising user experience and safety during interaction. In this article, we developed a fault-tolerant control strategy for torque assistance in a knee exoskeleton and investigated user experience during a walking task while emulating faults.
View Article and Find Full Text PDFWant AI Summaries of new PubMed Abstracts delivered to your In-box?
Enter search terms and have AI summaries delivered each week - change queries or unsubscribe any time!