AI Article Synopsis
- The use of 6-GHz frequencies for passive Surface Acoustic Wave (SAW) tags is explored, highlighting a specific inline design.
- The device can be miniaturized due to an ultrawide bandwidth of 775 MHz while maintaining an acceptable reflected response loss of about 50 dB.
- The tags were fabricated using E-beam lithography, demonstrating performance near expectations, with a loss of approximately 55 dB, and there's potential for high-throughput manufacturing through a combination of techniques.
Article Abstract
The possibility of using 6-GHz frequencies for passive SAW tags is discussed. An example of an inline 6-GHz SAW tag design is presented. Supposing that an ultrawide frequency bandwidth B = 775 MHz can be used, the tag dimensions can be significantly reduced and the loss of reflected response remains at an acceptable level of around 50 dB. The devices were manufactured using E-beam lithography and, probed on wafer, show performance close to predicted, including the loss level of approximately 55 dB. The possibility of high-throughput manufacturing by combining nano-imprint and e-beam lithography is discussed.
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| http://dx.doi.org/10.1109/TUFFC.2014.006423 | DOI Listing |
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