We propose a modified Bethe formula for low-energy electron stopping power without fitting parameters for a wide range of elements and compounds. This formula maintains the generality of the Bethe formula and gives reasonable agreement in comparing the predicted stopping powers for 15 elements and 6 compounds with the experimental data and those calculated within dielectric theory including the exchange effect. Use of the stopping power obtained from this formula for hydrogen silsesquioxane in Monte Carlo simulation gives the energy deposition distribution in consistent with the experimental data.
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