Note: development of high speed confocal 3D profilometer.

Rev Sci Instrum

Electrical and Computer Engineering Department, National University of Singapore, 4 Engineering Drive 3, Singapore 117576.

Published: November 2014

A high-speed confocal 3D profilometer based on the chromatic confocal technology and spinning Nipkow disk technique has been developed and tested. It can measure a whole surface topography by taking only one image that requires less than 0.3 s. Surface height information is retrieved based on the ratios of red, green, and blue color information. A new vector projection technique has developed to enhance the vertical resolution of the measurement. The measurement accuracy of the prototype system has been verified via different test samples.

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http://dx.doi.org/10.1063/1.4901518DOI Listing

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