AI Article Synopsis
- White light interferometry enhances the measurement capabilities of traditional monochromatic interferometers, allowing for more accurate step height measurements.
- The study employs Hilbert transformation to analyze a single white light interferogram captured by a color CCD camera, enabling independent phase calculations for the red, green, and blue components.
- This method streamlines the measurement process, making it quicker, simpler, and more affordable, as demonstrated through its application on a micro-sample.
Article Abstract
White light interferometry is a widely used tool to extend the unambiguous measurement range of a monochromatic interferometer. In this work, we discuss Hilbert transformation analysis of a single white light interferogram acquired with a single-chip color CCD camera for step height measurement which lies beyond the unambiguous range of the monochromatic interferometry. The color interferogram is decomposed and phase maps for red, green, and blue components are calculated independently using Hilbert transformation. This procedure makes the measurement faster, simpler, and cost-effective. The usefulness of the technique is demonstrated on micro-sample.
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| http://dx.doi.org/10.1364/OE.22.027373 | DOI Listing |
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