AI Article Synopsis
- This study focuses on improving spectral purity in extreme ultraviolet (EUV) and soft X-ray optical systems, typically a trade-off for efficiency.
- Researchers developed a new technique using a periodic, tapered structure combined with an EUV multilayer, which effectively scatters longer wavelength radiation while allowing EUV light to be reflected.
- Initial results demonstrated a significant broadband suppression of wavelengths from 100-400 nm, achieving an average suppression factor of 14 and a high EUV reflectance of 64.7%, which is close to the efficiency of standard EUV multilayer mirrors.
Article Abstract
High spectral purity at longer wavelength side is demanded in many extreme ultraviolet (EUV) and soft X-ray (together also referred to as XUV) optical systems. It is usually obtained at the expense of a high loss of XUV efficiency. We proposed and developed a new method based on a periodic, tapered structure integrated with an EUV multilayer. The longer wavelength radiation is scattered/diffracted away by the tapered multilayer structure while the EUV light is reflected. The first proof-of-principle showed a broadband suppression from λ = 100-400 nm with an average factor of 14. Moreover, a high EUV reflectance of 64.7% was achieved, which corresponds to 94% of the efficiency of a regular EUV multilayer mirror.
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| http://dx.doi.org/10.1364/OE.22.019365 | DOI Listing |
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