Depth profiling of element concentrations in stratified materials by confocal microbeam X-ray fluorescence spectrometry with polychromatic excitation.

The confocal microbeam X-ray fluorescence technique is a well-established analytical tool that is widely used for qualitative and quantitative analysis of stratified materials. There are several different reconstruction methods dedicated to this type of samples. However, these methods are applicable with monochromatic excitation only. The full description of matrix effects and geometrical effects for polychromatic X-ray photons in confocal geometry is a demanding task. In the present paper, this problem was overcome by the use of effective energy approximation. The reduction of the whole energy dimension into one effective value eliminates the necessity of integration over the primary beam energy range for a number of basic parameters. This simplification is attainable without loss of the accuracy of analysis. The proposed approach was validated by applying it to the reconstruction of element concentration depth profiles of stratified standard samples measured with tabletop confocal microbeam X-ray fluorescence setup and by comparing the obtained results of two independent algorithms.