Electron beam position monitor for a dielectric microaccelerator.

We report the fabrication and first demonstration of an electron beam position monitor for a dielectric microaccelerator. This device is fabricated on a fused silica substrate using standard optical lithography techniques and uses the radiated optical wavelength to measure the electron beam position with a resolution of 10 μm, or 7% of the electron beam spot size. This device also measures the electron beam spot size in one dimension.