Obtaining sub-10 pm spatial resolution by extended X-ray absorption fine structure (EXAFS) spectroscopy is required in many important fields of research, such as lattice distortion studies in colossal magnetic resistance materials, high-temperature superconductivity materials etc. However, based on the existing EXAFS data analysis methods, EXAFS has a spatial resolution limit of π/2Δk which is larger than 0.1 Å. In this paper a new data analysis method which can easily achieve sub-10 pm resolution is introduced. Theoretically, the resolution limit of the method is three times better than that normally available. The method is examined by numerical simulation and experimental data. As a demonstration, the LaFe1-xCrxO3 system (x = 0, 1/3, 2/3) is studied and the structural information of FeO6 octahedral distortion as a function of Cr doping is resolved directly from EXAFS, where a resolution better than 0.074 Å is achieved.
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