Sub-nanometer flattening of 45 cm long, 45 actuator x-ray deformable mirror.

We have built a 45 cm long x-ray deformable mirror (XDM) of super-polished single-crystal silicon that has 45 actuators along the tangential axis. After assembly, the surface height error was 19 nm rms. With use of high-precision visible-light metrology and precise control algorithms, we have actuated the XDM and flattened its entire surface to 0.7 nm rms controllable figure error. This is, to our knowledge, the first sub-nanometer active flattening of a substrate longer than 15 cm.