An imaging and loss evaluation method for semiconductor waveguides coupled with non-doped quantum wells is presented. Using the internal emission of the wells as a probe light source, the numbers and widths of the modes of waveguides with various ridge sizes were evaluated by CCD imaging, and the obtained values were consistent with effective index method calculation. Waveguide internal losses were obtained from analyses of the Fabry-Pérot fringes of waveguide emission spectra. We quantified the quality of 29 single-mode waveguide samples as an internal loss and variation of 10.2 ± 0.6 cm(-1).
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