All metal nanoelectromechanical switch working at 300 °C for rugged electronics applications.

Nanoscale

Department of Electrical and Computer Engineering, National University of Singapore, 4 Engineering Drive 3, Singapore 117576.

Published: June 2014

An all metal based electrostatic nanoelectromechanical switch has been fabricated using a one mask process. High temperature cycling behavior is demonstrated in a vacuum chamber at 300 °C for more than 28 hours. The compelling results indicate that the design is promising for the realization of rugged electronics with three-dimensional integration.

Download full-text PDF

Source
http://dx.doi.org/10.1039/c3nr05255aDOI Listing

Publication Analysis

Top Keywords

nanoelectromechanical switch
8
300 °c
8
rugged electronics
8
metal nanoelectromechanical
4
switch working
4
working 300
4
°c rugged
4
electronics applications
4
applications metal
4
metal based
4

Similar Publications

Want AI Summaries of new PubMed Abstracts delivered to your In-box?

Enter search terms and have AI summaries delivered each week - change queries or unsubscribe any time!