We report on the development of a new type of scanning acoustic microscope. We use a femtosecond light pulse to generate a short sound pulse, and then focus this sound onto the sample by means of a specially designed and microfabricated acoustic lens of radius a few microns. The sound travels to the sample through a thin layer of water. The sound reflected from the sample is collected by the lens and then passes through a monolithically integrated optical resonant cavity. The induced change in the properties of this cavity are measured using a time-delayed probe light pulse. We describe some of the challenges involved in the construction and operation of this high-precision metrology apparatus and present some preliminary results.
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| http://dx.doi.org/10.1016/j.ultras.2014.02.010 | DOI Listing |
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