We recorded the fast oscillation of sub-micron cantilevers using time-resolved extreme ultraviolet (EUV) Fourier transform holography. A tabletop capillary discharge EUV laser with a wavelength of 46.9 nm provided a large flux of coherent illumination that was split using a Fresnel zone plate to generate the object and the reference beams. The reference wave was produced by the first order focus while a central opening in the zone plate provided a direct illumination of the cantilevers. Single-shot holograms allowed for the composition of a movie featuring the fast oscillation. Three-dimensional displacements of the object were determined as well by numerical back-propagation, or "refocusing" of the electromagnetic fields during the reconstruction of a single hologram.
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| http://dx.doi.org/10.1364/OE.22.004161 | DOI Listing |
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