Experiments and identification of the unbalance of aerostatic guideways on the micro-scale.

Sensors (Basel)

College of Mechanical Engineering & Applied Electronics Technology, Beijing University of Technology, Beijing 100124, China.

Published: March 2014

In order to diagnose the unbalance of aerostatic guideways, displacement and acceleration sensors were used to measure the vibration signals of the unbalance of the aerostatic guideways caused by the gas fluctuation. The frequency characteristics for the unbalance of aerostatic guideways caused by gas fluctuation has been extracted from the measured signals by power spectral density, and the basic frequencies of the guideway system have been diagnosed according to spectral characteristics, in agreement with the results calculated by the corresponding motion equations and the finite element method.

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http://www.ncbi.nlm.nih.gov/pmc/articles/PMC4003950PMC
http://dx.doi.org/10.3390/s140304416DOI Listing

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Experiments and identification of the unbalance of aerostatic guideways on the micro-scale.

Sensors (Basel)

March 2014

College of Mechanical Engineering & Applied Electronics Technology, Beijing University of Technology, Beijing 100124, China.

In order to diagnose the unbalance of aerostatic guideways, displacement and acceleration sensors were used to measure the vibration signals of the unbalance of the aerostatic guideways caused by the gas fluctuation. The frequency characteristics for the unbalance of aerostatic guideways caused by gas fluctuation has been extracted from the measured signals by power spectral density, and the basic frequencies of the guideway system have been diagnosed according to spectral characteristics, in agreement with the results calculated by the corresponding motion equations and the finite element method.

View Article and Find Full Text PDF

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