Active gratings have been used to realize a grazing-incidence double-grating monochromator for the spectral selection of ultrashort pulses while preserving the temporal duration by compensating for the pulse-front tilt. The active grating consists of a bimorph deformable mirror on the top of which a diffraction grating with laminar profile is realized by UV lithography. The time-delay compensated configuration has been tested with ultrashort pulses at 800 nm. The feasibility of this configuration for the extreme-ultraviolet spectral region has been demonstrated by ray tracing studies.
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