Electrokinetic microscopy: a technique for imaging three-dimensional surface topography and heterogeneity of surface material.

In the present study, we introduce the concept of an electrokinetic microscope (EKM), a non-contact type probe microscope that can simultaneously provide a test specimen's three-dimensional surface topography and heterogeneity of surface material. In the EKM, the flow impedance and the streaming potential are measured during the scanning process to reproduce the topography and the heterogeneity, respectively. The working principle of the EKM is experimentally demonstrated by measuring specimens whose surfaces consist of thin layers of various materials and topographical differences. Experimental results also show that the EKM can be used regardless of the electrical conductivity of test specimens.