Ab initio simulation of helium-ion microscopy images: the case of suspended graphene.

Helium ion microscopy (HIM), which was released in 2006 by Ward et al., provides nondestructive imaging of nanoscale objects with higher contrast than scanning electron microscopy. HIM measurement of suspended graphene under typical conditions is simulated by first-principles time-dependent density functional theory and the 30 keV He+ collision is found to induce the emission of electrons dependent on the impact point. This finding suggests the possibility of obtaining a highly accurate image of the honeycomb pattern of suspended graphene by HIM. Comparison with a simulation of He0 under the same kinetic energy shows that electron emission is governed by the impact ionization instead of Auger process initiated by neutralization of He+.