The free vibrations of a two-layered C-axis inclined zig-zag ZnO thin-film bulk acoustic wave resonator (FBAR) connected to external impedance are analyzed. The frequency equation and mode shape for this resonator are derived based on the linear piezoelectric theory. The impedance characteristics of the FBAR are derived and compared with previous experimental results.
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| http://dx.doi.org/10.1109/TUFFC.2012.2526 | DOI Listing |
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