The thermal stability of thin Ru single layer and Ru/TaN bilayers grown on bare Si by plasma enhanced atomic layer deposition (PEALD) have been studied with Cu/Ru, Cu/Ru/TaN structures as a function of annealing temperature. To investigate the characteristics as a copper diffusion barrier, a 50 nm thick Cu film was sputtered on Ru and Ru/TaN layers and each samples subjected to thermal annealing under N2 ambient with varied temperature 300, 400, and 500 degrees C, respectively. It was found that the single 5 nm thick ALD Ru layer acted as an effective Cu diffusion barrier up to 400 degrees C. On the other hand ALD Ru (5 nm)/TaN (3.2 nm) showed the improved diffusion barrier characteristics even though the annealing temperature increased up to 500 degrees C. Based on the experimental results, the failure mechanism of diffusion barrier would be related to the crystallization of amorphous Ru thin film as temperature raised which implies the crystallized Ru grain boundary served as the diffusion path of Cu atoms. The combination of ALD Ru incorporated with TaN layer would be a promising barrier structure in Cu metallization.
Download full-text PDF |
Source |
|---|---|
| http://dx.doi.org/10.1166/jnn.2012.6312 | DOI Listing |
Publication Analysis
Top Keywords
Similar Publications
We report on the design and fabrication of a novel circular pillar array as an interfacial barrier for microfluidic microphysiological systems ( ). Traditional barrier interfaces, such as porous membranes and microchannel arrays, present limitations due to inconsistent pore size, complex fabrication and device assembly, and lack of tunability using a scalable design. Our pillar array overcomes these limitations by providing precise control over pore size, porosity, and hydraulic resistance through simple modifications of pillar dimensions.
View Article and Find Full Text PDFDiffusion-weighted arterial spin labeling MRI to investigate mannitol-induced blood brain barrier disruption.
Magn Reson Imaging
January 2025
Department of Radiology, Albert Einstein College of Medicine and Montefiore Medical Center, Bronx, NY, USA. Electronic address:
Purpose: Diffusion-weighted arterial spin labeling (DW-ASL) MRI has been proposed to determine the rate of water exchange (K) across the blood brain barrier (BBB). This study aims to further evaluate K MRI by comparing it with standard dynamic contrast-enhanced (DCE) MRI and histology in association with mannitol-induced disruption of the BBB.
Methods: DW-ASL was measured using a multiple b-value MRI protocol in normal rats at three post-labeling delays (N = 19), before and after intra-carotid injection of mannitol to disrupt BBB in one hemisphere (N = 13).
Use of multi-modal non-contrast MRI to predict functional outcomes after stroke: A study using DP-pCASL, DTI, NODDI, and MAP MRI.
Neuroimage Clin
January 2025
Department of Neurological Surgery, Thomas Jefferson University Hospital, Philadelphia, PA, United States. Electronic address:
Purpose: This study aims to assess whether water exchange rate (k), a surrogate for blood-brain barrier (BBB) permeability, is associated with functional outcomes in patients with acute ischemic stroke (AIS).
Methods: We studied 22 AIS patients enrolled from 1/2022 to 4/2024 who underwent multi-modal non-contrast imaging on a 3.0-Tesla scanner, including DP-pCASL, DTI, NODDI and MAP imaging.
In-situ conversion of BiOBr to Br-doped BiOCl nanosheets for "rocking chair" zinc-ion battery.
J Colloid Interface Sci
January 2025
School of Mechanical Engineering and Mechanics, School of Chemistry, Xiangtan University, Xiangtan 411105 PR China. Electronic address:
Developing insertion-type anodes is essential for designing high-performance "rocking chair" zinc-ion batteries. BiOCl shows great potential as an insertion-type anode material for Zn storage due to its high specific capacity and unique layered structure. However, the development of BiOCl has been significantly hampered by its poor stability and kinetics during cycling.
View Article and Find Full Text PDFIntegrated Assessment of Productive, Environmental, and Social Performances of Adopting Low-Protein Diets Technology for Laying Hens.
Animals (Basel)
January 2025
State Key Laboratory of Nutrient Use and Management, College of Resources and Environmental Sciences, China Agricultural University, Beijing 100193, China.
China, the world's largest egg producer, faces challenges of protein feed shortages and nitrogen pollution from manure. Low-protein diets (LPDs) offer potential solutions, but their adoption by small-scale farmers is uncertain. This study used surveys, meta-analysis, life-cycle assessment, and life-cost analysis to address these gaps.
View Article and Find Full Text PDFWant AI Summaries of new PubMed Abstracts delivered to your In-box?
Enter search terms and have AI summaries delivered each week - change queries or unsubscribe any time!