Carbon coils could be synthesized using C2H2/H2 as source gases and SF6 as an incorporated additive gas under thermal chemical vapor deposition system. Nickel catalyst layer deposition and then hydrogen plasma pretreatment were performed prior to the carbon coils deposition reaction. According to the different reaction processes, the injection time of SF6 gas flow was varied. The characteristics (formation density, morphology, and geometry) of the deposited carbon coils on the substrates were investigated according to the different reaction processes. Finally, the large-scale synthesis of carbon coils and their geometry control could be achieved merely by manipulating SF6 gas flow injection time. Three cases growth aspects were proposed according to SF6 gas flow injection time in association with the fluorine's characteristics for etching the materials or enhancing the nucleation sites.
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