Crystalline C60 and amorphous graphite-like films of nanocolumn arrays fabricated by glancing angle deposition of C60 fullerene at substrate temperatures of -425 K were studied by transmission electron microscopy (TEM) and atomic-force microscopy (AFM). Characteristic dimension of columns is 200-400 nm. We used co-deposition of C60 molecules and accelerated C60 ions to modify the structure and properties of nanocolumn arrays. Influence of incidence angle for C60 ions on formation of film morphology was revealed. Raman spectrum analysis showed that amorphous carbon nanocolumns consist of nanographite areas with average size of -1.5 nm. The films have high conductivity (close to graphite) and have no mechanical stresses. The carbon films were applied in all-solid-state rechargeable thin-film battery as an anode layer. The nanocolumn amorphous carbon film as anode electrode showed the discharge capacity of about 50 microAh cm(-2)microm(-1) and good cycling ability over 100 times in full cell system.
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