We carefully evaluate how porous silicon (pSi) surface oxidation by ozone (O(3)) and the resulting changes in nanocrystallite surface chemistries (e.g., SiOSi, SiH(x) (x = 1-3), O(y)SiH (y = 1-2), and SiOH) influence the pSi photoluminescence (PL). We discover a relationship between the pSi PL and the O(2)SiH band amplitude.
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