An autonomous method for calibrating the reference flat surface of an interferometer is proposed with the uncertainty analysis. The method consists of three phases; the first step is multiple rotating shifts of a specimen, the second is a linear shift, and the last is multiple rotating shifts again. The profile of the reference flat surface is basically determined by the linear shift. The linear shift errors that occurred during the linear shift are identified by the rotating shifts. The rotating shift errors caused by the rotating shifts can be compensated and the residual uncertainty can be reduced in proportion to the square root of the number of rotating shifts per one revolution. Finally, the uncertainty analysis is carried out in detail.
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