AI Article Synopsis
- Researchers developed a mushroom-shaped phase change memory (PCM) using a novel nanoarray of materials, including Cr/In(3)Sb(1)Te(2) (IST) and TiN as the bottom electrode.
- The fabrication process utilized block copolymer lithography and a dry etching technique, making it suitable for high-performance applications on a flexible substrate called GFR Hybrimer.
- This approach enabled the creation of densely packed hexagonal nanoscale PCM cell arrays, achieving an impressive areal density of around 176 Gb/in².
Article Abstract
Mushroom-shaped phase change memory (PCM) consisting of a Cr/In(3)Sb(1)Te(2) (IST)/TiN (bottom electrode) nanoarray was fabricated via block copolymer lithography and single-step dry etching with a gas mixture of Ar/Cl(2). The process was performed on a high performance transparent glass-fabric reinforced composite film (GFR Hybrimer) suitable for use as a novel substrate for flexible devices. The use of GFR Hybrimer with low thermal expansion and flat surfaces enabled successful nanoscale patterning of functional phase change materials on flexible substrates. Block copolymer lithography employing asymmetrical block copolymer blends with hexagonal cylindrical self-assembled morphologies resulted in the creation of hexagonal nanoscale PCM cell arrays with an areal density of approximately 176 Gb/in(2).
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| http://dx.doi.org/10.1088/0957-4484/23/25/255301 | DOI Listing |
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