Thin metal films are good candidates of terahertz detectors, reflectors, waveguides and terahertz quantum-cascade lasers (THz-QCLs). The optical parameter is the basis not only for designing the THz components but also for developing novel optoelectronic materials. In the present paper, the complex refractive indices of the ultra-thin metal (Cr, Ni and Ti) films in the THz band were obtained by the THz differential time-domain spectroscopy. The reflection spectra of the GaAs/metals interface were calculated according to the Fresnel formula. The mean reflectance of 25 nm Cr, Ni and Ti are over 80% from 0.3 to 1.5 THz. The results show that ultra-thin metal films can be used for reflectors as well as the electrodes in the THz band.
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