Characteristics of a disperse phase of liquid metal ion source on the basis of various working substances are investigated. It is revealed that generation of the charged particles occurs in the threshold image and is simultaneously accompanied by excitation of capillary instability on a surface of the emitter. The majority of particles has the size about 2 nm (Sn) and a specific charge of 5 × 10(4) C∕kg. If the working liquid possesses high viscosity (Ni), generation of nanodroplets does not occur. Gold nanoparticles are used for deposition on a surface of quartz cantilevers with the purpose of increase in sensitivity of biosensors and on an external surface of carbon nanotubes for creation pressure sensors. By means of an ion source nanostructures can be etched on a flat surface of conductive materials without difficult ion optics.
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