Felling of individual freestanding nanoobjects using focused-ion-beam milling for investigations of structural and transport properties.

Nanotechnology

Beijing National Lab of Condensed Matter Physics, Institute of Physics, Chinese Academy of Sciences, Beijing, People's Republic of China.

Published: March 2012

We report that, to enable studies of their compositional, structural and electrical properties, freestanding individual nanoobjects can be selectively felled in a controllable way by the technique of low-current focused-ion-beam (FIB) milling with the ion beam at a chosen angle of incidence to the nanoobject. To demonstrate the suitability of the technique, we report results for zigzag/straight tungsten nanowires grown vertically on support substrates and then felled for characterization. We also describe a systematic investigation of the effect of the experimental geometry and parameters on the felling process and on the induced wire-bending phenomenon. The method of felling freestanding nanoobjects using FIB is an advantageous new technique enabling investigations of the properties of selected individual nanoobjects.

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Source
http://dx.doi.org/10.1088/0957-4484/23/10/105301DOI Listing

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