Impedance spectroscopy in the radio frequency range from 100 MHz to 20 GHz can reveal the dielectric relaxations of biological and chemical solutions. S-parameters for a coplanar waveguide are derived. To perform these measurements, a coplanar waveguide device was fabricated on a conventional FR-4 substrate for fluid interrogation. The microfluidic channel was formed by milling conventional waveguides and laser-cutting channels in the dielectric substrate. Measurements using this device were performed on standards: deionized water, isopropyl alcohol, and air. These measurements were compared to those taken with a conventional dielectric probe. The results demonstrate the ability of the fabricated device to extract varying transmission parameters due to changing sample properties.
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