Femtosecond laser tuning of silicon microring resonators.

Femtosecond laser modification is demonstrated as a possible method for postfabrication tuning of silicon microring resonators. Single 400 nm femtosecond laser pulses were used to modify the effective index of crystalline silicon microring waveguides by either amorphization or surface nanomilling depending on the laser fluence. Both blue- and redshifts in the microring resonance could be achieved without imparting significant degradation to the device quality factor.