Nanoporous low-kappa films were manufactured by using a 3-step process: co-deposition of a skeleton and porogens by PECVD, porogen removal by remote plasma and UV cure. In this study, the influence of both the variation of the porogen load and the different types of UV-cures on several film characteristics were investigated. Improved kappa-values were observed for increased porogen to skeleton ratios and a broad band cure, where the wavelength of the photons is always higher than 200 nm. However the Young's modulus and hardness decreased correspondingly. These variations can be attributed to the changing density and chemical composition of the different films. A wide range of low-kappa films was obtained by tuning the porogen load and applying different types of UV cures.
Download full-text PDF |
Source |
|---|---|
| http://dx.doi.org/10.1166/jnn.2011.5033 | DOI Listing |
Publication Analysis
Top Keywords
Similar Publications
Synthesis and performance evaluation of ZnO/CdS photoanodes with copper sulfide (CuS) and carbon counter electrodes.
Sci Rep
December 2024
Advanced Physics Laboratory, Department of Physics, Savitribai Phule Pune University, Pune, Maharashtra, 411007, India.
The present study demonstrates the synthesis of compact ZnO layers using CdS sensitized on ZnO as a photoanode with copper sulfide (CuS) and carbon as a counter electrode (CE). In this study, a compact ZnO layer was fabricated using the simple and low-cost successive ionic layer adsorption and reaction (SILAR) method, and CuS CE films were synthesized using the chemical bath deposition method. Various characterizations, such as X-ray diffraction (XRD) and X-ray photoelectron spectroscopy (XPS), confirmed the formation of ZnO and CdS sensitizations on the ZnO .
View Article and Find Full Text PDFHighly Sensitive Low-Frequency Acoustic Sensor Based on Functionalized Graphene Oxide.
Small
December 2024
State Key Laboratory of Precision Measurement Technology and Instruments, School of Precision Instruments and Optoelectronics Engineering, Tianjin University, Tianjin, 300072, China.
Developing miniaturized low-frequency acoustic sensors with high sensitivity is crucial for diverse applications, including geological monitoring and aerospace exploration. However, the performance of low-frequency acoustic sensor is constrained by the limited mechanical robustness of traditional sensing films at nanoscale thickness. Here, a functionalized graphene oxide (GO)-based Fabry-Perot (FP) low-frequency sensor is proposed, with characteristics of compact size, resistance to electromagnetic interference high-sensitivity low minimum detectable pressure (MDP), and a high signal-to-noise ratio (SNR).
View Article and Find Full Text PDFThe effects of filter fabrication approaches on photocatalytic abatement of formaldehyde in an indoor environment using a TiO-based air purifier system.
Environ Res
December 2024
Department of Global Smart City & School of Civil, Architectural Engineering, and Landscape Architecture, Sungkyunkwan University, 2066 Seobu-ro, Suwon 16419, Republic of Korea. Electronic address:
Titanium dioxide (TiO) is the most commonly used catalyst for fabricating commercial photocatalytic air purifier (AP) systems. The AP performance can be affected sensitively by the preparation conditions of filters and the physicochemical properties (e.g.
View Article and Find Full Text PDFTunable aptamer-MXene sensing interface for label-free and real-time detection of toxic pollutants in water samples.
Biosens Bioelectron
December 2024
Key Laboratory of Industrial Ecology and Environmental Engineering (MOE), School of Environmental Science and Technology, Dalian University of Technology, Dalian, 116024, China.
Stable and low-cost field-effect transistor (FET)-based biosensors are vital for the on-site detection of toxic pollutants in environmental monitoring applications. In this study, a tunable aptamer-MXene sensing interface was constructed to develop renewable FET biosensors. This was achieved through the reversible disulfide bond (-S-S-) reaction between the SH-TiCT film and thiolated aptamer.
View Article and Find Full Text PDFEstablishing an end-to-end workflow for SNSPD fabrication and characterization.
Sci Rep
December 2024
School of Electrical and Electronic Engineering, Nanyang Technological University, 639798, Singapore, Singapore.
The outstanding performance of superconducting nanowire single-photon detectors (SNSPDs) has expanded their application areas from quantum technologies to astronomy, space communication, imaging, and LiDAR. As a result, there has been a surge in demand for these devices, that commercial products cannot readily meet. Consequently, more research and development efforts are being directed towards establishing in-house SNSPD manufacturing, leveraging existing nano-fabrication capabilities that can be customized and fine-tuned for specific needs.
View Article and Find Full Text PDFWant AI Summaries of new PubMed Abstracts delivered to your In-box?
Enter search terms and have AI summaries delivered each week - change queries or unsubscribe any time!