AI Article Synopsis
- A new method has been developed to create wafer-scale, thin encapsulated two-dimensional nanochannels using traditional surface-micromachining and thin-film evaporation techniques.
- Key steps include carefully etching a sacrificial layer to form nano-scale underetching spaces and precise thin-film evaporation for encapsulation.
- The resulting nanochannel arrays have dimensions as small as 20 nm and can effectively contain solutions with low concentrations of fluorescent molecules, enabling visualization of single molecules for the first time.
Article Abstract
We present a new and simple approach to fabricate wafer-scale, thin encapsulated, two-dimensional nanochannels by using conventional surface-micromachining technology and thin-film evaporation. The key steps to the realization of two-dimensional nanochannels are a fine etching of a sacrificial layer to create underetching spaces at the nanometer regime, and an accurate thin-film evaporation for encapsulation. Well-defined cross-sectional, encapsulated nanochannel arrays with dimensions as small as 20 nm in both width and height have been realized at the wafer-scale. The fabricated nanochannels with a channel length of 10mm have been used as a suitable fluidic platform for confining a solution containing nanomolar concentrations of Alexa fluorescent molecules. Initial results toward visualization of single Alexa molecules in the confined solution are reported.
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| http://dx.doi.org/10.1016/j.jcis.2011.10.001 | DOI Listing |
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