Optical force stamping lithography.

Nano Lett

Photonics and Optoelectronics Group, Physics Department and CeNS, Ludwig-Maximilians-Universität München, Amalienstr 54, 80799 Munich, Germany.

Published: November 2011

Here we introduce a new paradigm of far-field optical lithography, optical force stamping lithography. The approach employs optical forces exerted by a spatially modulated light field on colloidal nanoparticles to rapidly stamp large arbitrary patterns comprised of single nanoparticles onto a substrate with a single-nanoparticle positioning accuracy well beyond the diffraction limit. Because the process is all-optical, the stamping pattern can be changed almost instantly and there is no constraint on the type of nanoparticle or substrates used.

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http://www.ncbi.nlm.nih.gov/pmc/articles/PMC3833036PMC
http://dx.doi.org/10.1021/nl203214nDOI Listing

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