Large aspect ratio 3D microstructures (arrays of square posts and linear rectangular gratings) fabricated in a number of azobenzene-containing materials by soft lithography were manipulated by a single beam of polarized light. The materials exhibited different response to the beam orientation and the direction of light polarization. An elongation of the square posts both along and perpendicular to the polarization plane was observed depending on material. Reversibility of the deformation has been demonstrated. Broadening of the hills, amplitude and shape changing were observed for linear gratings. A slanted expose led to the blazed asymmetric structures. Some aspects of light-induced deformation mechanisms in azobenzene-containing materials are discussed. The approach developed in the paper can be useful both for the understanding of mass transport mechanism in azobenzene-containing materials and for the fabrication of diffracted optical structures.
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