AI Article Synopsis
- The study introduces a high speed optical profiler (HSOP) that utilizes frequency-scanning lasers for 3D profiling of tiny structures.
- The HSOP features advancements such as a compact microscopic interferometer and an improved controller for accurate phase-shifting.
- Testing revealed that the HSOP achieves measurement speeds up to 30 Hz with a repeatability of less than 1 nm, making it suitable for inline inspections in industries like semiconductors and flat-panel displays.
Article Abstract
We present a high speed optical profiler (HSOP) using frequency-scanning lasers for three-dimensional profile measurements of microscopic structures. To improve upon previous techniques for implementing the HSOP, we developed frequency-scanning lasers and a compact microscopic interferometer. The controller of the HSOP was also modified to generate proper phase-shifting steps. For measurements of step height specimens, the HSOP showed results comparable with a commercial optical profiler, even with much higher measurement speeds (up to 30 Hz). The typical repeatability of step height measurement was less than 1 nm. We also present measurements of microscopic structures to verify the HSOP's ability to perform high speed inline inspection for the semiconductor and flat-panel display industries.
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| http://dx.doi.org/10.1063/1.3623501 | DOI Listing |
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