Extraordinary Hall effect probes with 160 nm × 160 nm working area were fabricated using photo- and electron-beam lithographic procedures with the aim of direct measurements of MFM cantilever tip magnetic properties. The magnetic field sensitivity of the probes was 35 Ω T(-1). Magnetic induction of the MFM cantilever tips coated by Co and SmCo films was measured with the probes. It was shown that the resolution of the probes was of the order of 10 nm.
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