Surface roughness and nano-morphology in SF(6) plasma etched silicon substrates are investigated in a helicon type plasma reactor as a function of etching time and process parameters. The plasma etched surfaces are analyzed by atomic force microscopy. It is found that dual scale nano-roughness is formatted on the silicon surface comprising an underlying nano-roughness and superimposed nano-mounds. Detailed metrological quantification is proposed for the characterization of dual scale surface morphology. As etching proceeds, the mounds become higher, fewer and wider, and the underlying nano-roughness also increases. Increase in wafer temperature leads to smoother surfaces with lower, fewer and wider nano-mounds. A mechanism based on the deposition of etch inhibiting particles during the etching process is proposed for the explanation of the experimental behavior. In addition, appropriately designed experiments are conducted, and they confirm the presence of this mechanism.
Download full-text PDF |
Source |
|---|---|
| http://dx.doi.org/10.1088/0957-4484/19/25/255301 | DOI Listing |
Publication Analysis
Top Keywords
Similar Publications
High-resolution depth imaging is essential in fields such as biological microscopy and material science. Traditional techniques like interferometry and holography often rely on phase stability and coherence, making them susceptible to noise and limiting their effectiveness in low-light conditions. We propose a time-of-flight (ToF) widefield microscopy technique that uses pseudo-thermal light.
View Article and Find Full Text PDFIn this study, we demonstrated an inspection system utilizing reflection phase microscopy to enhance both depth range and field of view (FOV). By implementing a dual-wavelength method, we achieved a maximum expected depth range of 7.7 µm.
View Article and Find Full Text PDFIntraindividual Comparison of Image Quality Between Low-Dose and Ultra-Low-Dose Abdominal CT With Deep Learning Reconstruction and Standard-Dose Abdominal CT Using Dual-Split Scan.
Invest Radiol
January 2025
From the Department of Radiology, Ulsan University Hospital, Ulsan, Republic of Korea (T.Y.L.); Department of Radiology, University of Ulsan College of Medicine, Seoul, Republic of Korea (T.Y.L.); Department of Radiology, Seoul National University Hospital, Seoul, Republic of Korea (J.H.Y., H.K., J.M.L.); Department of Radiology, Seoul National University College of Medicine, Seoul, Republic of Korea (J.H.Y., S.H.P., J.M.L.); Department of Radiology, Inje University Busan Paik Hospital, Busan, Republic of Korea (J.Y.P.); Department of Radiology, Seoul National University Bundang Hospital, Seongnam, Republic of Korea (S.H.P.); Department of Radiology, Hanyang University College of Medicine, Seoul, Republic of Korea (C.L.); Division of Biostatistics, Medical Research Collaborating Center, Seoul National University Hospital, Seoul, Republic of Korea (Y.C.); and Institute of Radiation Medicine, Seoul National University Medical Research Center, Seoul, Republic of Korea (J.M.L.).
Objective: The aim of this study was to intraindividually compare the conspicuity of focal liver lesions (FLLs) between low- and ultra-low-dose computed tomography (CT) with deep learning reconstruction (DLR) and standard-dose CT with model-based iterative reconstruction (MBIR) from a single CT using dual-split scan in patients with suspected liver metastasis via a noninferiority design.
Materials And Methods: This prospective study enrolled participants who met the eligibility criteria at 2 tertiary hospitals in South Korea from June 2022 to January 2023. The criteria included (a) being aged between 20 and 85 years and (b) having suspected or known liver metastases.
Examining spatiotemporal dynamics of CO emission at multiscale based on nighttime light data.
Heliyon
January 2025
School of Information Technology, Luoyang Normal University, Luoyang 471934, China.
Carbon emissions have increasingly been the focus of all governments as countries throughout the world choose carbon neutrality as a national development strategy. The analysis of the spatiotemporal dynamics of CO emission has emerged as a significant research topic considering the dual-carbon goal. In this research, we explore the spatiotemporal changes of CO emission at different scales based on nighttime light data.
View Article and Find Full Text PDFComputational discovery of co-expressed antigens as dual targeting candidates for cancer therapy through bulk, single-cell, and spatial transcriptomics.
Bioinform Adv
June 2024
Department of Pediatrics and Human Development, Michigan State University, Grand Rapids, MI 49503, United States.
Motivation: Bispecific antibodies (bsAbs) that bind to two distinct surface antigens on cancer cells are emerging as an appealing therapeutic strategy in cancer immunotherapy. However, considering the vast number of surface proteins, experimental identification of potential antigen pairs that are selectively expressed in cancer cells and not in normal cells is both costly and time-consuming. Recent studies have utilized large bulk RNA-seq databases to propose bispecific targets for various cancers.
View Article and Find Full Text PDFWant AI Summaries of new PubMed Abstracts delivered to your In-box?
Enter search terms and have AI summaries delivered each week - change queries or unsubscribe any time!