AI Article Synopsis
- Researchers created composite films using Ta-Si oxide and graded-index-like films through radio-frequency ion-beam sputtering.
- The study examined how thermal annealing affected the optical properties and residual stress of these films.
- The findings indicated that the composite and graded-index-like films maintained more stable residual stress and optical properties compared to traditional notch filters made with alternating layers of high and low index materials after annealing.
Article Abstract
Composite films of Ta-Si oxide and graded-index-like films have been realized by using radio-frequency ion-beam sputtering. The influence of thermal annealing on the optical properties and residual stress of single-layer composite films and graded-index-like films has been studied. The residual stress and optical properties of both types of films were more stable than that of the notch filters fabricated from a series of discrete quarter-wave layers made by alternatively stacking high and low index materials after annealing.
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| http://dx.doi.org/10.1364/AO.50.000C62 | DOI Listing |
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