Deassociate the initial temporal phase deviation provided by photoelastic modulator for stroboscopic illumination polarization modulated ellipsometry.

In addition to operating the imaging ellipsometric measurements by four-specific temporal phases in the photoelastic modulated ellipsometry, we added the fifth one to solve the initial phase of the photoelastic modulator. This methodology has been developed to conquer the slow imaging processing of charge-coupled device camera for the stroboscopic illumination in the polarization modulated imaging ellipsometry. Without any calibration in its initial phase, we can perform the ellipsometric measurement by the measurements of intensity at five-specific temporal phases. The intensities of a full cycle for a point on SiO(2)∕Si thin film were measured and analyzed for verifying this algorithm. The five stroboscopic illuminations were performed to measure the two-dimensional distribution of the same SiO(2)∕Si thin film.