Hybrid SiO2-TiO2 films are prepared starting from tetraisopropoxy titanate and 3-glycidoxipropyltrimethoxysilane, using the sol-gel process. During the sol synthesis titania clusters grow, conferring to the samples a photocatalytic activity. In this paper we exploit this property for the fabrication of surface-relief gratings. The realized structures are characterized by SEM, AFM and profilometric measurements, while the presence of titania clusters is confirmed by TEM analyses.
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