Nanoelectromechanical systems (NEMS) correlate analyte-binding events with the mechanical motions of devices in nanometer scales, which in turn are converted into detectable electrical or optical signals. Biosensors based on NEMS have the potential to achieve ultimate sensitivity down to the single-molecule level, provide rapid and real-time detection signals, be operated with extremely low power consumption, and be mass produced with low cost and high reproducibility. This chapter reviews fundamental concepts in NEMS fabrication, actuation and detection, and device characterization, with examples of using NEMS for sensing DNA, proteins, viruses, and bacteria.
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