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Directed fracture for the fabrication of free-standing multilayered submicrometer structures. | LitMetric
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Directed fracture for the fabrication of free-standing multilayered submicrometer structures.

Roberto R Robaina María José López-Martínez Jaume Esteve Raquel Perez-Castillejos José Antonio Plaza

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Institut de Microelectrònica de Barcelona, IMB-CNM (CSIC), Campus UAB, 08193 Cerdanyola, Barcelona, Spain.

Published: March 2011

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http://dx.doi.org/10.1002/smll.201001105DOI Listing

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