The perturbation method is combined with the Rigorous CoupledWave Analysis (RCWA) to enhance its computational speed. In the original RCWA, a grating is approximated by a stack of lamellar gratings and the number of eigenvalue systems to be solved is equal to the number of subgratings. The perturbation method allows to derive the eigensolutions in many layers from the computed eigensolutions of a reference layer provided that the optical and geometrical parameters of these layers differ only slightly. A trapezoidal grating is considered to evaluate the performance of the method.
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